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中文摘要：
测量技术的在里面飞机负担被开发执行力量测试微伸臂。把定理基于电磁，微 UTM (Universa！TestingMachine ) 内部地与负担范围 +-1 N 和排水量范围 +-300 亩 m 被做。一架在里面飞机装载在上的 Itapplies 免费结束微伸臂。负担为锚为伸臂的根充当弯曲矩，但是作为转矩。为有不同尺寸的样品，最终的负担从 1.3 ～ 69.8 mN 和计算转矩的结果表演与结合的长度的平方近似成正比。二个失败模式，在伸臂的根的破裂和在锚的骨折，被微检查观察到碎片，它显示有一个批评图案完成在伸臂和锚之间的力量平衡。工作证明微 UTM 是为微伸臂、类似的微观结构的力量测试的一台强大的仪器。
英文摘要：
An in-plane load measuring technique is developed to perform the strength test of the micro-cantilever. Based on electromagnetism theorem, Micro UTM （Universal Testing Machine） was in-house made with the load range ±1 N and the displacement range ±300μm. It applies an in-plane load on the free-end of the micro-cantilever. The load acts as a bending moment for the root of the cantilever, but as a torque for the anchor. The results show that for samples with different sizes the ultimate loads range from 1.3 to 69.8 mN and the calculated torque is approximately proportional to the square of the bonding length. Two failure modes, fracture at the root of the cantilever and fracture at the anchor, are observed by micro examination to the debris, which indicates that there is a critical design to achieve the strength balance between the cantilever and the anchor. The work demonstrates that Micro UTM is a powerful instrument for the strength test of the micro-cantilever and similar micro-structures.
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