中文摘要：

微细工具电极的获得及工艺过程控制是微细加工的关键。采用电化学方法制备微细探针和微圆柱体工具电极,在分析其成形机理的基础上,对影响微探针和微圆柱体电极的工艺参数,如通电方式、电解液浓度、电源性质、电极运动方式等进行分析。实验与分析的结果表明：采用液面下通电方式、适当浓度的电解液可以制得性能较好的探针;脉冲电源加工能够改善成形后微细电极的表面精度;电极的运动和脉冲电源由于破坏了腐蚀过程中的平衡,制备出的电极呈锥形。

英文摘要：

Preparation of micro-electrode and control of machining process are key technologies in micro-machining.Effects of various parameters on the forming of micro-pin or micro-tips manufactured by the electrochemical method,such as electric mode,concentration of electrolyte,kinds of power and movement of electrode,were discussed in detail on the basis of analyzing the shaping mechanism of them.The experimented and discussed results show that good micro-tips can be produced by electric mode under the water surface and proper concentration of the electrolyte;the precision of micro-electrodes can be improved by using pulse power;however,the shape of micro-pins becomes taper for the movement of electrodes and pulse power break down the balance in the corrosion process.