随着微能源技术的迅速发展和市场需求的不断增大,基于微机电系统(microelectromechanical systems,MEMS)技术的微型燃料电池由于其巨大应用前景逐渐得到社会的关注。本文详细介绍了国外微型燃料电池的应用概况,简要论述了将MEMS技术应用于微型燃料电池制作的可行性以及MEMS微型燃料电池的类型特点,并结合关键组件极板和膜电极,系统地总结了近几年来MEMS微型燃料电池的研究进展和成果,最后分析了目前存在的问题和发展趋势以及我国大力发展MEMS微型燃料电池的迫切需求。
With the rapid development and increasing market demand in the field of micro power sources, micro fuel cells based on microelectromechanical systems (MEMS) technology have been attracting more and more social attentions due to the great application prospects in the future. In this paper, the general situation of the overseas applications of micro fuel ceils is introduced in detail. The feasibility of micro fuel cells fabrication using MEMS technology and characteristics of different types of MEMS-based micro fuel cells are briefly discussed. Combining with the critical components including the monopolar plate and membrane electrode assembly (MEA), the latest research progress of MEMS-based micro fuel cells are also summarized are analyzed, and the urgent demand for developing systematically. Finally, the existing problems and development trend MEMS-based micro fuel cells in our country is demonstrated.