中文摘要：

针对一种微机电系统(micro electro mechanical system,MEMS)三维微触觉力传感器,采用悬臂梁弯曲变形获得了标准微小力信号,通过测量传感器敏感梁弹性导致的传感器测杆的微小位移量,对标定过程中的误差进行了补偿,实现了三维微触觉力传感器的精确标定.建立了MEMS三维微触觉力传感器标定系统,对悬臂梁的弹性系数进行了标定,对传感器测头输出的微小电压信号设计了线性化的信号调理电路.标定过程中考虑了由于传感器敏感梁弹性变形导致的传感器测杆的微小位移量对标定精度的影响.采用高精度的纳米测量机(nano-measuring machine,NMM)对传感器测杆的位移特性进行测量,利用该参数对传感器的力特性系数进行误差补偿,最后根据传感器输出的初始电压和力特性系数建立了传感器的力特性输出方程.

英文摘要：

A precise calibration method for micro electro mechanical system(MEMS) 3D micro-tactile force sensors was proposed in this paper.Standard micro-force signal was obtained from bending cantilever and the calibration error was compensated by measuring the micro displacements of the probe resulting from elasticity of the sensitive beam of the sensor.Calibration system for MEMS 3D micro-tactile force sensor was set up,in which the elasticity coefficient of cantilever was calibrated by precision balance and linea...