中文摘要：

采用激光脉冲沉积与射频等离子体相结合的方法（PLD-RF）,在蓝宝石衬底上一步沉积了掺氮铌酸锂（LiNbO_3∶N）薄膜。采用X射线衍射仪（XRD）、X射线光电子能谱仪（XPS）和紫外-可见-红外光谱仪（UV-Vis-NIR）对LiNbO_3∶N的晶格结构、掺杂含量及价态、光学性质进行了研究。结果表明铌酸锂薄膜沿（006）方向择优生长,其中氮的原子含量为2.04%,替代氧原子的位置,N的掺入有效的窄化了LiNbO_3的带隙,使其紫外-可见吸收光谱的吸收边出现红移,并且在铌酸锂禁带中引入了杂质能级（EN）,能级深度为2.7 eV。

英文摘要：

Nitrogen doping lithium niobate（LiNbO_3∶ N） film was deposited on the sapphire substrate by pulsed laser deposition assisted radio frequency plasma device（PLD-RF）.The structure,chemical compositions and optical property of LiNbO_3∶ N were characterized by X-ray diffraction analysis（XRD）,X-ray photoelectron spectroscopy（XPS）,and UV-vis-NIR absorption spectroscopy（UV-vis-NIR）.The results show that LiNbO_3 film grows along the preferential（006） direction,the doping content of N atom is 2.04% and N atoms substitute O-sites,and N doping effectively decreases the band gap and leads to a red shift of the absorption edge of LiNbO_3.An impurity energy level（EN）,equal to 2.7 e V,was introduced into the band gap of LiNbO_3.