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中文摘要：
针对LIGA制作微细群电极工艺复杂、价格昂贵的缺点，提出微细群电极的电火花超声复合反拷加工技术．根据微细电火花放电的机理，利用微细群孔放电反拷来制作微细群电极．基于微细群电极反拷电加工时圆柱电极不能旋转的特点，在加工中复合了超声振动，并在理论分析的基础上，系统地研究超声振动对微细群电极反拷电加工的影响．得到一系列3×3的微细群电极和由这些群电极制作的微细群孔，单电极直径小于30μm，长径比大于10，表面光洁，有很好的同轴度．
英文摘要：
This paper presented a reverse copying technology for micro-electrode array fabrication by ultrasonic enhanced micro-EDM, for micro-electrode array fabrication by LIGA has shortcomings such as complex technology and high price. Based on the mechanism of micro-EDM, micro-hole array discharge is used to fabricate micro-electrode array by reverse copying. In the process of reverse copying, the thicker rod electrode can not rotate and results in electric arc and short-circuit easily, so the process is enhanced by ultrasonic vibration. The influence of ultrasonic vibration is analyzed theoretically and proved by machining experiments. Finally, 3 × 3 arrays of microelectrode and micro-hole array made with these micro-electrode arrays are obtained, the diameter of a single electrode is less than 30 μm and the aspect of the holes ratios is more than 10, also they have good surface quality.
同期刊论文项目
同项目期刊论文
Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technol
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