中文摘要：

利用LCD作为加工掩模，采用波长为1064nm的纳秒脉冲激光进行液晶掩模加工试验研究。讨论了液晶掩模对激光的调制作用，并且通过试验研究了液晶掩模加工图形特点和液晶损伤的阈值，测得了液晶掩模损伤阈值。观察液晶掩模的加工形貌发现，图形线条呈现边缘没有烧蚀而内部发生烧蚀的现象，其原因是由于黑栅遮光引起的边框效应和黑色像素的光透射率较高。结果表明：液晶掩模能够通过调节光的透射率实现遮掩效果，激光能量对液晶掩模具有破坏作用，液晶掩模的激光损伤阈值约为2．5J／cm^2；激光能量密度在0．6～0．8J／cm^2之间时能够加工出完整的图形。

英文摘要：

Using liquid crystal display（LCD） as a mask, a nanosecond pulsed laser（1 064 nm） was applied to study the characteristic of laser processing with LCD mask. The modulation effect of LCD mask on laser was discussed and the graphics morphology of laser processing and the damage threshold of LCD were studied by experiment. The laser damage threshold of LCD mask was measured. By observing the graphics morphology, the graphics of LCD mask processing showed that its edges were not ablated but the inside was ablated. It was considered that the reason of this phenomenon were the frame effect caused by opaque lattice shading light and the high light transmittance of black pixel. The results show that the LCD mask can achieve cover effect by adjusting the light transmittance and the laser energy has a destructive effect on LCD. The laser damage threshold of LCD mask is about 2.5 J/cm^2 and a complete graphics can be ablated in the 0.6-0.8 J/cm^2.