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Effect of bias in patterning diamond by a dual electron cyclotron resonance–radio-frequency oxygen p
  • ISSN号：0040-6090
  • 期刊名称：Thin Solid Films
  • 时间：0
  • 页码：1985-1989
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： B. Ke|F. Ding|T.L. Ni|L. Wang|X.H. Wen|M.D. Chen|X.D. Zhu |
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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