中文摘要：

结合衍射理论和矩阵光学方法得出抛物面型X射线组合折射透镜的光学性能指标（包括其焦距的严格表达式、薄透镜近似的判定准则、透过率和有效孔径,以及极限聚焦光斑尺寸等）.采用X射线深度光刻技术实际制作了PMMA材料抛物面型X射线组合折射透镜并给出了工艺测试结果.最后在北京同步辐射装置（BSRF）上,实际构建了基于3种不同结构参数的PMMA材料抛物面型X射线组合折射透镜的微束聚焦实验系统.并实际测试了其聚焦性能,均获得了良好的聚焦效果,给出实测结果并对实测结果进行了分析和讨论.

英文摘要：

The parabolic compound X-ray refractive lenses are a kind of novel optical components, especially suitable for hard X-rays. Due to their parabolic profiles they are free of spherical aberration and are proper devices for sub-micrometer focusing and imaging. The focusing performance of the parabolic compound X-ray refractive lenses is studied theoretically and experimentally in this paper. Firstly, the derivation of the exact focal length formula using matrix optics method and a criterion of the thin lens approximation are described. And the intensity distribution near focus, limiting focal spot size, effective aperture and transmittance are deduced based on the diffraction theory. Several parabolic compound X-ray refractive lenses with PMMA material were fabricated by means of deep X-ray lithography. Then the X-ray microbeam experimental system was built on the 4W1A beamline of Beijing Synchrotron Radiation Facility （BSRF） based on the parabolic compound X-ray refractive lenses we fabricated. The focusing performances of three PMMA parabolic compound X-ray refractive lenses were measured and analyzed under 8 keV monochromatic X-rays. According to the experimental results, it is concluded that the PMMA parabolic compound X-ray refractive lenses promises good hard X-ray focusing performance.