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Deposition and characterization of reactive magnetron sputtered zirconium carbide films
  • ISSN号：0257-8972
  • 期刊名称：Surface and Coatings Technology
  • 时间：2013
  • 页码：876-883
  • 相关项目：超硬纳米多层膜中应力调控及其对择优取向、相结构和超硬效应影响的研究
作者： Q.N. Meng|M. Wen|F. Mao|N. Nedfors|U. Jansson|W.T. Zheng|
同期刊论文项目
超硬纳米多层膜中应力调控及其对择优取向、相结构和超硬效应影响的研究
期刊论文 18
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