中文摘要：

基于静电悬浮的惯性器件（静电加速度计或自由转子陀螺仪），其球形转子存在各种性质的工艺误差，最终影响着惯性器件的精度。本文通过分析球形转子的质心偏移以及转子表面非球形问题，为指导静电加速度计和自由转子陀螺仪的加工以及误差补偿提供依据。

英文摘要：

The spherical rotor of inertial devices which include the electrostatic accelerometer and the free-rotor gyroscope based on electrostatic suspension has various technical errors, and the accuracy of the inertial devices is influenced finally. The purpose of this paper is to discuss the ccntroid offset and the asphericity of the spherical rotor, and the results provide evidence for the machining and the error compensating of the electrostatic acce!erometer and the free-rotor gyroscope.