探讨了自支撑金刚石厚膜片的晶体生长模型,并依据模型通过热丝化学气相沉积(HFCVD)法制备了厚度为0.6 mm的自支撑金刚石厚膜片.采用球-盘式摩擦磨损试验机进行摩擦学实验,借助扫描电镜、拉曼光谱仪等研究了自支撑金刚石厚膜片分别与钢球、陶瓷球以及铝球组成对偶副时的摩擦学特性.结果表明:铝球做对偶球时平均摩擦系数最大,在对磨初始阶段很快出现了金属转移层;陶瓷球做对偶球时摩擦系数最小,球表面物质的微观形貌呈微细碎屑状分布;对磨后自支撑金刚石厚膜片的磨损量非常小,是良好的耐磨材料.
A crystal growth model of freestanding thick diamond film was discussed,and on the basis of this model,a self-standing thick diamond film slice of a thickness of about 0. 6 mm was prepared by means of HFCVD( Hot-Filament-Assisted Chemical Vapor Deposition) method. Then,a friction experiment of the film slice was conducted on a ball-disc tribometer,and the tribological properties of the film slices respectively with a steel ball,a ceramic ball and an aluminum ball as the friction pair were characterized by using a SEM and a Raman spectrometer. The results show that(1) when the friction pair is an aluminum ball,average friction coefficient is the biggest and metal transfer layer appears very fast in the initial stage of grinding;(2) when the friction pair is a ceramic ball,the average friction coefficient is the smallest and the ball surface material is in a fine clastic distribution; and(3) the wear of the film slice is very small after the experiment,which means that the film slice is a good wear-resistant material.