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Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2
  • ISSN号：1071-1023
  • 期刊名称：Journal of Vacuum Science and Technology B
  • 时间：0
  • 页码：1-5
  • 相关项目：应变硅/硅锗微细特征单元结构失稳及应变弛豫研究
作者： Wang, Hong-Bo|Ma, Da-Yan|Ma, Fei|Xu, Ke-Wei|
同期刊论文项目
应变硅/硅锗微细特征单元结构失稳及应变弛豫研究
期刊论文 18
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