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电化学微/纳米加工技术
  • ISSN号：1000-8438
  • 期刊名称：大学化学
  • 时间：0
  • 页码：1-8
  • 分类：O646[理学—物理化学;理学—化学]
  • 作者机构：[1]厦门大学化学化工学院化学系,福建厦门361005, [2]厦门大学固体表面物理化学国家重点实验室,361005
  • 相关基金：基金资助：国家自然科学基金（No.91023006,91023047,91023043）;中央高校基本科研业务费专项资金（No.2010121022）
  • 相关项目：扫描电化学显微镜组合探针技术及其微加工应用
作者： 张杰|詹东平|贾晶春|朱益亮|韩联欢|袁野|时康|周剑章|田昭武|田中群|
关键词： 微/纳米加工技术, 电化学微/纳米加工, 约束刻蚀剂层技术
中文摘要：

介绍电化学微／纳米加工技术，特别是厦门大学电化学微／纳米加工课题组建立起来的约束刻蚀剂层技术，旨在让广大师生了解这一特种加工技术，共同促进我国电化学微／纳米加工技术的研究及产业化进程。

同期刊论文项目
铜互连层表面的约束刻蚀化学平坦化新方法
期刊论文 18 会议论文 7
微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
期刊论文 45 会议论文 27
扫描电化学显微镜组合探针技术及其微加工应用
期刊论文 12
基于约束刻蚀剂层的超光滑表面加工新方法
期刊论文 8 会议论文 1
同项目期刊论文
Factors Influencing Hydroxyl Radical Formation in a Photo-Induced Confined Etching System
New Strategy for Electrochemical Micropatterning of Nafion Film in Sulfuric Acid Solution
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Electrogenerated chemical polishing of copper
A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical
Numerical studies on scavenging reaction in confined etchant layer technique (CELT)
A novel planarization method based on photoinduced confined chemical etching.
A leveling method based on current feedback mode of scanning electrochemical microscopy.
Electrochemical mechanical micromachining based on confined etchant layer technique.
光诱导约束刻蚀体系中羟基自由基生成的影响因素
由苯胺二聚体电化学制备聚苯胺的形貌可控性初探
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Electrochemical mechanical micromachining based on confined etchant layer technique.
光诱导约束刻蚀体系中羟基自由基生成的影响因素
A novel planarization method based on photoinduced confined chemical etching
单晶硅表面硝酸银活化化学镀镍工艺
三自由度θxθyZ柔性机构的柔度分析与计算
Kinetic investigation on the confined etching system of n？type Gallium arsenide by scanning electroc
Parameter Identification of the Generalized Prandtl-Ishlinskii Model for Piezoelectric Actuators Usi
Development of an automatic approaching system for electrochemical nanofabrication using visual and
A digital lock-in amplifier based contact detection technique for electrochemical nanolithography
电化学微/纳加工技术
铝合金电化学加工中的钝化行为及其对加工过程的影响
Fabrication of Microstructures on GaAs with Pulsed Electrochemical Wet Stamping
Combinatorial screening of photoelectrocatalytic system with high signal/noise ratio
Modeling and control of piezo-actuated nanopositioning stages: A survey
三自由度&theta;x&theta;yZ柔性机构的柔度分析与计算
常温磷化过程中的开路电位-时间曲线以及成膜规律
Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Ev
Motion Control of Piezoceramic Actuators with Creep, Hysteresis and Vibration Compensation
Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators with a Mo
A Comprehensive Dynamic Modeling Approach for Giant Magnetostrictive Material Actuators
Design, Analysis and Testing of a Parallel-kinematic High-bandwidth XY Nanopositioning Stage
微纳制造装备中拱形桥架的结构优化设计
Motion control of piezoelectric positioning stages: modeling, controller design and experimental eva
Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlins
Design of a distributed multiaxis motion control system using the IEEE-1394 bus
Modeling of rate-dependent hysteresis in piezoelectric actuators using a family of ellipses
A Modified Prandtl-Ishlinskii Model for Rate-dependent Hysteresis Nonlinearity Using mth-power Veloc
High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and dist
An experimental comparison of proportional-integral, sliding mode, and robust adaptive control for p
Electrochemical micromachining with wet stamping: Instrument design and experimental investigation
Development of an electrochemical micromachining instrument for the confined etching techniques
Proxy-based sliding mode tracking control of piezoelectric-actuated nanopositioning stages
Design and control of a decoupled two degree of freedom translation parallel micro-positioning stage
Identification of Prandtl-Ishlinskii hysteresis models using modified particle swarm optimization
High Precision Electrochemical Micromachining Based on Confined Etchant Layer Technique
Electrochemical Mechanical Micromachining Based On Confined Etchant Layer Technique
High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input sha
Comparative experiments regarding approaches to feedforward hysteresis compensation for piezoceramic
基于LabVIEW的微纳加工系统设计与研究
Integral Resonant Damping for High-bandwidth Control of Piezoceramic Stack Actuators with Asymmetric
铝合金电解加工中的钝化行为及其对加工过程的影响
Electrochemical Synthesis of Silver-Tetracyanoquinodimethane Nanorods at Agar Supported Water/1,2-Di
普鲁士蓝纳米修饰电极的制备及表征
钴氰化钠/氯化钠固体溶液微晶体的电化学制备及其特性
吸附物种在金纳米电极上的表面扩散
基于琼脂支撑的液/液界面上AgTCNQ的电化学合成
期刊信息
  • 《大学化学》
  • 主管单位:中华人民共和国教育部
  • 主办单位:北京大学 中国化学会
  • 主编：段连运
  • 地址：北京大学化学楼C区202
  • 邮编：100871
  • 邮箱：
  • 电话：010-62751721
  • 国际标准刊号：ISSN：1000-8438
  • 国内统一刊号：ISSN：11-1815/O6
  • 邮发代号:82-314
  • 获奖情况:
  • 国内外数据库收录:
  • 美国化学文摘（网络版）
  • 被引量:9145