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Quantum confinement effects and source-to-drain tunneling in ultra-scaled double-gate silicon n-MOSFETs
  • ISSN号:1674-1056
  • 期刊名称:《中国物理B:英文版》
  • 分类:TN386.1[电子电信—物理电子学] TN304.12[电子电信—物理电子学]
  • 作者机构:[1]State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, China
  • 相关基金:Project supported by the National Basic Research Program of China (Grant No. G2009CB929300) and the National NaturalScience Foundation of China (Grant Nos. 60821061 and 60776061).
中文摘要:

By using the linear combination of bulk band (LCBB) method incorporated with the top of the barrier splitting (TBS) model,we present a comprehensive study on the quantum confinement effects and the source-to-drain tunneling in the ultra-scaled double-gate (DG) metal-oxide-semiconductor field-effect transistors (MOSFETs).A critical body thickness value of 5 nm is found,below which severe valley splittings among different X valleys for the occupied charge density and the current contributions occur in ultra-thin silicon body structures.It is also found that the tunneling current could be nearly 100% with an ultra-scaled channel length.Different from the previous simulation results,it is found that the source-to-drain tunneling could be effectively suppressed in the ultra-thin body thickness (2.0 nm and below) by the quantum confinement and the tunneling could be suppressed down to below 5% when the channel length approaches 16 nm regardless of the body thickness.

英文摘要:

By using the linear combination of bulk band (LCBB) method incorporated with the top of the barrier splitting (TBS) model, we present a comprehensive study on the quantum confinement effects and the source-to-drain tunneling in the ultra-scaled double-gate (DG) metal-oxide semiconductor field-effect transistors (MOSFETs). A critical body thickness value of 5 nm is found, below which severe valley splittings among different X valleys for the occupied charge density and the current contributions occur in ultra-thin silicon body structures. It is also found that the tunneling current could be nearly 100% with an ultra-scaled channel length. Different from the previous simulation results, it is found that the source-to-drain tunneling could be effectively suppressed in the ultra-thin body thickness (2.0 nm and below) by the quantum confinement and the tunneling could be suppressed down to below 5% when the channel length approaches 16 nm regardless of the body thickness.

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期刊信息
  • 《中国物理B:英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国物理学会和中国科学院物理研究所
  • 主编:欧阳钟灿
  • 地址:北京 中关村 中国科学院物理研究所内
  • 邮编:100080
  • 邮箱:
  • 电话:010-82649026 82649519
  • 国际标准刊号:ISSN:1674-1056
  • 国内统一刊号:ISSN:11-5639/O4
  • 邮发代号:
  • 获奖情况:
  • 国内外数据库收录:
  • 被引量:406