中文摘要：

玻璃材料上的光波导是实现光电印制电路板（EOCB）中导光层制作的重要候选材料,交叉波导是EOCB上常用的集成光学结构,交叉损耗是其关键的参数之一。采用离子交换（IE）法和电场辅助离子迁移（FAIM）技术在玻璃基片上制作了宽分别为5、10、20、30和40μm的垂直交叉光波导,并对波导宽度对波导损耗的影响进行了研究。研究结果表明,玻璃交叉波导损耗对波导宽度有明显的依赖关系,当波导宽从40μm减小到5μm时,交叉波导损耗从0.071dB减小到0.019dB。研究结果可为EOCB上波导交叉结构的优化提供了参考。

英文摘要：

Cross-waveguide is one of building blocks widely employed in electro-optical circuit board （EOCB） light-guiding layer. To characterize the dependence of cross-waveguide loss on waveguide width,perpendicular cross-waveguides with different widths of 5 μm, 10 μm, 20 μm, 30 μm and 40 μm have been manufactured by ion-exchange （IE）, and subsequently electric field-assisted ion-migration （FAIM） in glass substrate. Crossing loss of these waveguides has been characterized on these waveguides. Results show that the crossing loss of waveguide on glass substrate exhibits significant dependence on waveguide width：with waveguide width decreasing from 40 μm to 5 μm, the crossing loss of glass-based waveguide decreases from 0. 071 dB/cross to 0. 019 dB/cross. The dependence of crossing loss on optical waveguide provides a new dimension for the optimization of EOCB.