中文摘要：

溶胶-凝胶法在Si（100）基片上旋涂法制备铒硅酸盐化合物（Ersilicate）薄膜.系统研究了烧结温度和烧结时间对Ersilicate薄膜相结构、相转变以及光致发光特性的影响.在1000℃以下,薄膜晶体结构为Er2O3晶体和SiO2非晶的混合物.随着烧结温度增加到1200℃,保温时间增加到30min,薄膜晶体结构转变成（100）,（200）和（300）择优取向的Er2SiO5相.Ersilicate晶体结构对光致发光（PL）性能有显著的影响,Er2O3晶体和SiO2非晶混合物的光致发光主峰为1.535μm,当晶体结构转变成Er2SiO5,主峰变为1.528μm,强度提高10—20倍.研究结果表明具有强光致发光特性的Er2SiO5薄膜是一种有前景的硅基光子学光源候选材料.

英文摘要：

The Er2SiO5 films with strong room-temperature photoluminescence have been fabricated by using the sol-gel spin coating method. The effects of sintering temperature and time on phase structure and phase transformation of ErSiO films have been investigated. A mixture of Er2O3 crystal and amorphous SiO2 was obtained below 1000 ℃ ,and the Er2SiO5 phase with high （100）,（200）,and （300） preferred orientation was detected when the temperature increased to higher than 1200 ℃. The phase structure has an evident influence on the photoluminescence properties for ErSiO films. For the phase structure of Er2O3 crystal with amorphous SiO2,the weak PL spectra with a main peak at λ = 1. 535 μm were observed. The strongest main PL peak moved to λ = 1. 528 μm,and the intensity was increased about 10—20 times when the phase structure changed to Er2SiO5. The Er2SiO5 films with strong room temperature photoluminescence are promising candidates for application in Si-based light source and amplifier.