中文摘要：

首先说明了微机械陀螺的四种传统检测方法的局限性，然后设计了一种新型的基于介观压阻效应的GaAs／AlAs/In0.1Ga0.9As贴膜微机械陀螺．指出了该陀螺设计时应注意的几个方面，并且利用介观压阻理论分析得出用共振隧穿薄膜作为敏感元件能将微机械陀螺的灵敏度提高一个数量级，证明了介观压阻效应的微陀螺比传统压阻检测方式的微陀螺具有更高的灵敏度和精度。

英文摘要：

The application of micro-machined gyroscope based on meso-piezoresistance effect was introduced in the paper because of limitation of the four traditional test methods of the micro-machined gyroscope. A new type of GaAs/AlAs/ In0.3 Ga0.9 As thin film micro-machined gyroscope was designed. It was analyzed by meso-piezoresistance that the micromachined gyroscope＇s sensibility would be raised one magnitude when resonant tunneling film was used as a sensing element. The higher sensibility and accuracy of meso-piezoresistance micro-machined gyroscope were proved.