位置：成果数据库 > 期刊 > 期刊详情页
Surface-plasmon polariton interference nanolithography based on end-fire coupling
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：0
  • 页码：1037-1040
  • 语言：英文
  • 相关项目：无掩模SPP波导干涉光刻研究
作者： Guo, Yongkang|Du, Jinglei|Luo, Xiangang|Du, Chunlei|Guo, Xiaowei|
同期刊论文项目
无掩模SPP波导干涉光刻研究
期刊论文 31 专利 1
同项目期刊论文
用等腰三角形位相光栅进行相干光并束的研究
大面积拼接光栅的远场衍射分析
多光点扫描数字光刻制作DOE的方法研究
High-efficiency transmission of nanoscale information by surface plasmon polaritons from near field
亚波长金属聚焦透镜结构参数的优化与分析
十字星形金属纳米粒子的消光性质
菱形金属纳米粒子光学性质的研究
无掩模多束SPPs干涉光刻成像仿真软件研究
表面等离激元体干涉制备纳米光子晶体的模拟分析
High efficiency picosecond pulse C6H12 Raman laser amplified by DCM fluorescence
基于表面等离子体激元耦合相位板超聚焦透镜结构的优化设计
Theoretical Analysis of Interference Nanolithography of Surface Plasmon Polaritons without a Match L
Near-Field Optical Transfer Function for Far-Field Super-Resolution Imaging
Approach of enhancing exposure depth for evanescent wave interference lithography
Analysis of waveguide structure for surface plasmon polariton interference
提高OLED光导出效率的异形金属光栅的设计与优化
Spatial light modulator based on surface plasmon polaritons for chromatic display
Multiple wavelength-channels in SPP waveguides for optical communication
The theoretic analysis of maskless surface plasmon resonant interference lithography by prism coupli
193 nm interference nanolithography based on SPP
RET simulations for SLM-based maskless lithography
Implementation of coherent array beam combination using two-dimensional sine phase grating
Stimulated Raman scattering mode competition in C6H12 under different pump wavelength
抗蚀剂AZ4562曝光参数的变化趋势分析
用二维正弦相位光栅实现阵列激光相干并束
不同波长激光激发下C6H12受激拉曼散射模式竞争
SPPs光刻曝光显影模拟研究
多束SPPs干涉成像模拟研究