通过有限元方法,计算了DAC内垫片孔侧壁与样品发生不同程度短路的情况下,范德堡法测量样品电阻率的相对误差.发现垫片孔侧壁与样品短路面积小于20%时,相对误差可以控制在10%以内.而当短路面积超过25%时,相对误差迅速增大.研究中还发现,电极越靠近样品边缘,相对误差越小.
Using Finite Analysis Method, relative error of van der Pauw mode in electrical resistivity measuring were calculated in situation of varying area of electrical short between the sample and the inside wall of the gasket. It is revealed that if the shortened area is less then 20M, the relative error is smaller than 10%. After the shortened area exceeded 25M, the relative error increasing vary fast. It is also discovered that the more the electrode is near to the edge of the sample, the smaller the relative error is.