中文摘要：

利用化学浴沉积和层层自组装方法,在含有自组装涂层硅衬底上制备二氧化钛薄膜。研究温度对二氧化钛薄膜结构、厚度和微观形貌的影响。紫外可见光谱结果表明,钛过氧配合物在410nm处的吸收峰强度随着温度的升高而逐渐减小。由XRD分析结果可知,沉积的纳米二氧化钛薄膜为无定形层。SEM分析结果表明,在温度60°C、时间2h时可制得连续、致密、均一的二氧化钛薄膜,粒度分布为20~40nm间。EDS分析表明薄膜的化学组成为O和Ti,两者的摩尔比为2.2：1。

英文摘要：

Titanium oxide thin films were prepared on self-assembled monolayers-coated silicon substrate using layer-by-layer self-assembly method and chemical bath deposition from an aqueous solution. The effects of temperature on structural properties, thickness and morphologies of titanium oxide thin films were investigated. The results show that the absorption peak of peroxo complexes of titanium at 410 nm decreases gradually with increasing the temperature. The deposited films consisting of titanium oxide nanocrystals are believed to be fully amorphous by XRD. Titanium oxide thin films fabricated at 60 °C for 2 h are continuous, dense and homogeneous with a size in the range of 20-40 nm by SEM. The chemical compositions of deposited thin films were studied by EDS, and the mole ratio of O to Ti is 2.2：1.