中文摘要：

对电子回旋共振低温等离子体化学气相沉积工艺（ECR-PECVD）沉积GaN薄膜过程中的氮气和三甲基镓有机金属气体（TMG）混合气体等离子体发射光谱进行分析。结果表明TMG在等离子体自加热条件下就发生离解,N2/TMG混合气体ECR等离子体主要以Ga气体粒子和亚稳态氮分子为主。发射光谱特征谱线随微波功率变化分析表明：当微波功率高于400W时,亚稳态氮分子浓度随着微波功率的增加而增加,而高激发态氮分子以及氮分子离子浓度却随着减少。

英文摘要：

The optical emission spectroscopy of hybrid N2/trimethylgallium（TMG） plasma in an ECR-PECVD system was investigated.The results indicate that the TMG gas is strongly dissociated into Ga＊,CH and H even under self-heating condition.Ga species and nitrogen molecule in metastable state are dominant in hybrid ECR plasma.The concentration of metastable nitrogen molecule increases with the microwave power.On the other hand,the concentration of excited nitrogen molecules and of nitrogen ion decreases when the microwave power is higher than 400 W.