中文摘要：

为简化6支链并联微动机器人结构、减小其装配误差,提出了压电陶瓷驱动的3支链6自由度并联微动机器人结构。采用整体式下平台和3条两端带有柔性球铰链和单轴直圆柔性铰链的支杆,使结构紧凑并有利于提高精度。在分析逆解的基础上,根据工作空间要求设计了整体尺寸。根据柔性铰链选取原则,对直角平板和支杆处柔性铰链进行尺寸选择,采用有限元分析对整体刚度进行分析和安全校验。样机测试结果表明了设计的可行性。

英文摘要：

A type of three-limbed 6-DOF parallel micromanipulator driven by piezoelectric actuators is presented for simplifying the complex structure and reducing the assembly error of the usual 6-limed ones. It is very compact and helpful to improve the accuracy for using the monolithic bottom stage and only three fixed-length rods with different flexure hinges at the two ends. The whole dimensions are determined by workspace demand after obtaining the inverse kinematics. According to the selection principle of the flexure hinges, the parameters of elastic plates and the hinges on the rods are designed. The finite element analysis methods are used for analyzing the stiffness and safety of the mechanism. The test results have shown the validity of the design.