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Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc
  • ISSN号：1070-664X
  • 期刊名称：Physics of Plasmas
  • 时间：0
  • 页码：033502-1-033502-5
  • 语言：英文
  • 相关项目：双频电容耦合放电等离子体流体动力学数值模拟
作者： Xu, Xiang|Dai, Zhong-Ling|Jiang, Wei|Wang, You-Nian|
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双频电容耦合放电等离子体流体动力学数值模拟
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