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GaN films deposited by middle- frequency magnetron sputtering
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  • 相关项目：加速器—电镜联机及其在材料科学中的应用
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加速器—电镜联机及其在材料科学中的应用
期刊论文 65 会议论文 28
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Effects of Bias Voltage on the Structure and Mechanical Properties of Thick CrN Coatings Deposited by Mid-Frequency Magnetron Sputtering