中文摘要：

由于材料尺度的限制,微纳器件的制作工艺一般较为复杂。以ZnO,SnO2和石墨粉为原料,采用化学气相沉积（CVD）法成功制备出长度达厘米级别的分等级结构ZnO微米线。分别通过立体显微镜、场发射扫描电子显微镜（FE-SEM）和X射线粉末衍射仪（XRD）对样品的形貌和结构进行表征。结果表明所制备的材料其一级结构为ZnO微米线,二级机构为四周均匀生长的ZnO微米短棒。设计制作出一种基于单根ZnO微米线的自供电传感器,并以乙醇为目标检测物进行敏感性能测试。结果表明：在不加外部电源的情况下,接触乙醇液体可以得到0.15 V的输出电压或25 nA的输出电流。

英文摘要：

The fabrication process of micro/nano device is generally complex due to the restriction of materials scale. Ultralong hierarchical ZnO microwires were successfully prepared by chemical vapor deposition （CVD） method with ZnO, SnO2 and graphite powders as raw materials. The morphology and structure of the ultralong ZnO microwires were characterized by stereo microscope, field emission scanning electron microscope （FE-SEM） and X-ray powder diffraction （XRD）. The results show that the ultralong ZnO microwires have hierarchical structure, whose primary structure is ZnO microwires and secondary structure is ZnO microrods. The self-powered sensor was designed and fabricated and its sensitive properties to ethanol were tested. In the absence of external power, the sensor can response to ethanol and demonstrate 0.15 V output voltage or 25 nA output current.