中文摘要：

大行程高精度柔性并联微定位平台的需求与日俱增.提出了一种新颖的大行程XY柔性并联微定位平台,它具有镜面对称的结构和冗余约束特性,镜像对称结构能够很好地约束了面内寄生转角和交叉轴耦合,冗余约束在提高系统刚度的同时还降低了运动平台的质量.建立了柔性微定位平台的柔度矩阵模型,用于确定尺寸参数.最后,通过有限元模型分析,并与理论模型对比.结果显示本文所设计的柔性并联微定位平台具有如下特点：20mm×20mm的大运动行程,两运动轴之间具有较高的解耦度,很好地约束了面内寄生转角,其值小于17.76μrad.

英文摘要：

The need for a compliant parallel micro positioning stage （CPMS） providing large motion range and high precision is increasing.This paper presents a novel large range XY CPMS with a mirror symmetry structure and a redundant constraint characteristic.The mirror symmetry structure can well constraint in plane parasitic angle and cross axis coupling.The redundant constraint improves out of plane stiffness and reduces the mass of a motion stage.Then compliance matrix models for the large range XY CPMS is presented and used for determining the geometrical parameter.Finally the finite element analysis （FEA）models is analyzed and compared with theoretical model.The result show that the CPMS in this paper has many merits：large range of motion up to 20mm × 20mm,a high degree of decoupling between the two motion axes,well constrained in plane parasitic rotation less than 17.76μrad.XY compliant parallel micro positioning stage,large range motion,cross axis decoupling,compliance matrix.