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The Effects of CHF3/Ar Gas-Mixing Ratio on Etching Characteristics ofBST Thin Films， Dai,Liping; Zha
  • ISSN号：1936-6612
  • 期刊名称：Advanced Science Letters
  • 时间：2013.9.5
  • 页码：1624-1627
  • 相关项目：铁电薄膜微图形化及其电性能相关性研究
作者： 戴丽萍|
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