中文摘要：

刻划光栅的槽形为三角形或梯形、自由光谱范围窄、理论分辨本领与平面光栅有可能达到的最高分辨本领相差无几、角色散比平面光栅高几倍,为了利用这些优点研究人员对光栅刻划机不断改进。本文论述了刻划光栅制造技术的进展,首先分析了刻划光栅传统的制造方法,介绍了各种技术的原理及成果。讨论了刻划光栅最新的制造技术,最后对刻划光栅制造技术的发展趋势做了简要预测。

英文摘要：

In order to use the good characteristics of ruling grating such as triangular or trapezoidal groove,narrow free spectral range,theoretical resolving power which is the same as the highest of plane grating,and higher dispersion than the plane grating,researchers have been improving the manufacturing technology of ruling grating.The paper discusses the development of fabrication technology of ruling grating.Firstly,the traditional technologies of fabricating ruling grating are summarized.The principles and results of various technologies are introduced.The latest manufacturing technologies of ruling gratings are discussed.Finally,the prospects of ruling grating manufacture are put forward too.