Glioma cell line C6 cultured on silicon surfaces modified by different chemical functional groups, including mercapto (-SH), carboxyl (-COOH), amino (-NH2), hydroxyl (-OH) and methyl (-CH3) groups, was studied here to investigate the influence of surface chemistry on the cell proliferation, adhesion and apoptosis. AFM confirmed the similar characteristic of different functional groups occupation. The adhering C6 exhibited morphological changes in response to different chemical functional groups. The C6 adhered to -COOH, -NH2, -OH and -CH3 surfaces and flattened morphology, while those on -SH surface exhibited the smallest contact area with mostly rounded morphology, which led to the death of cancer cells. The results of MTT assay showed that the -COOH and -NH2 groups promoted ceil proliferation, while the -SH significantly inhibited the proliferation. Compared with other chemical functional groups, the -SH group exhibited its unique effect on the fate of cancer cells, which might provide means for the design of biomaterials to prevent and treat glioma.