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Electrochemical mechanical micromachining based on confined etchant layer technique.
  • ISSN号：1359-6640
  • 期刊名称：Faraday Discussions
  • 时间：2013
  • 页码：189-197
  • 相关项目：铜互连层表面的约束刻蚀化学平坦化新方法
作者： Jia, Jingchun|Zhao, Xuesen|Cao, Yongzhi|Hu, Zhenjiang|Yan, Yongda|Dong, Shen|Tian, Zhong-Qun|Tian, Zhao-Wu|Zhan, Dongping|
同期刊论文项目
铜互连层表面的约束刻蚀化学平坦化新方法
期刊论文 18 会议论文 7
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