中文摘要：

针对半导体炉管区瓶颈设备的批处理调度问题,提出满足工艺约束和设备限制的组批调度算法.在考虑产品动态到达的基础上,根据半导体制造系统大规模、多重入、混合型生产等特征,针对晶圆平均等待时间进行优化,实现多产品、多机台的实时组合派工.仿真实验在一个虚拟的晶圆制造系统上进行.结果表明,该算法在实时派工中对瓶颈设备填充率和利用率显著提升,有效地缩短了产品加工周期.

英文摘要：

To solve the scheduling problem of batch processing machine in the furnace district of semiconductor wafer fabrication system（SWFS）,this paper proposed a scheduling algorithm which satisfies the process constraint and equipment limitations.Considering the dynamic arrival of lots and the SWFS＇s features of large scale and multiple re-entrant process,the algorithm may realize the real-time combinatory dispatching of multi-product and multi-machine by optimizing average waiting time of lots.The simulation based experiments were executed on a virtual SWFS fab simulation platform,and the result shows that the algorithm can significantly improve the fill rate and the utilization of the bottleneck,thus shorten the cycle time in real-time dispatching.