中文摘要：

传统的三平面互检法与ZYGO干涉仪自带的three-flats程序都不能实现三个平面的三维面型测量.以ZYGO干涉仪的GPI程序为基础,通过对仪器的局部改装,实现对三个平面的三维面型测量的一种改进的三平面互检法.将改进的三平面互检法的结果取其纵向面型信息与ZYGO干涉仪中three-flats程序直接测得的三个平面纵向面型的测量结果进行比较,结果PV值误差在0.001λ以内.验证了此法的准确性和可行性,为干涉法测量高精度面型技术的发展提供有力的支持.

英文摘要：

The traditional three-flat test and three-flat program with the ZYGO interferometer （Model： Verifire PE） can not measure the three flats of three-dimension. An improved three-flat test, based on the GPI program of the ZYGO interferometer, with partial modification of the instrument achieve the measurement of three flats of three-dimension. Compared the vertical information of the results of the improved three-flat test and the vertical information directly measured by the three-flats program of the ZYGO interferometer, the results of the PV error is less than 0. 001λ. The accuracy and feasibility of this method has been verified. This method will provide strong support for the precision measurement technology of interference.