中文摘要：

主要介绍了ZnO纳米棒修饰的石英晶体微天平（QCM）气体传感器的制备与测试.采用两步法在石英晶振片表面制备直径为100 nm的ZnO纳米棒敏感膜,构成QCM NH3传感器.检测系统为自主研发的基于LabVIEW平台的QCM气体传感器频率测试软件.检测NH3的体积分数为5×10-6～50 ×10-6,响应时间均在10s以内,最大频差值为10.9 Hz,响应最大频差值与NH3体积分数呈现良好的线性关系.室温条件下,ZnO纳米棒敏感膜可以完全实现吸附解吸过程,具有可逆性.该传感器性能稳定,响应灵敏,具有重复性.

英文摘要：

Preparation and test of quartz crystal microbalance （QCM） gas sensor modified by ZnO nanorods is mainly introduced.ZnO nanorods sensitive film with 100 nm diameter which is fabricated by two-step method on surface of quartz crystal,constitutes QCM NH3 gas sensor.Detection system is self-developed frequency testing software of QCM gas sensor based on LabVIEW platform.Volume fraction of the detected NH3 gas is 5 × 10-6～50 × 10-6,response time is within 10 s,the maximum frequency difference value is 10.9 Hz,and the maximum frequency difference value of response exhibites a good linear relationship with NH3 gas.Under the condition of room temperature,ZnO nanorods sensitive film has reversibility which can fully achieve the adsorption and desorption process.The sensor has stable property,sensitive response and good repeatability.