中文摘要：

研究了掺杂Cu的Sn的氧化物薄膜,它可以作为微型薄膜锂电池负极材料。这种薄膜是采用磁控溅射的方式,在硅基底上沉积了SnOx和金属Cu。XRD分析和SEM观察表明：随着金属Cu掺杂量的增加,所制备薄膜由晶态趋向于非晶态,有利于锂离子的嵌入与脱出。恒电流充放电测试表明：随着金属Cu掺杂量的增加,SnOx薄膜放电容量有所增加,循环性能有很大的提高。这种掺杂Cu的SnOx薄膜的制备方法可用于微型薄膜锂离子电池。

英文摘要：

SnOx thin films doped with Cu as negative electrode for micro thin film Li-ion battery are studied. SnOx thin films use magnetron sputtering mode SnOx and Cu are dleposited on Si substrate. The XRD analysis and SEM observation show that phase of thin oxide thin films tends from crystalline to amorphous with the increase of doping amount of Cu, which helps Li-ion to implant and abjection. Constant current charge and discharge tests show that with the increase of doping amount of Cu,the discharge capacity of SnOx films is increased and cycle performance is greatly improved. The method of fabrication of SnOx thin film doped with Cu can be used for micro thin film Liion microbatteries.