中文摘要：

提出了一种正交偏振干涉仪中光学元件位置固定与性能检测的方法,用于亚纳米级测量分辨力激光干涉仪的光路系统集成及其性能评价。构建了光学干涉仪在线检测与评价系统,基于强度检测方案,实时地对干涉仪输出的四路偏振光信号强度、干涉条纹可见度以及各路干涉信号之间的正交状态进行检测,并完成了小尺寸正交偏振激光干涉仪的光路集成;分别对分立式与集成式干涉仪的稳定性和微弱振动信号测量进行了对比实验。实验表明,集成式激光干涉仪的测量分辨力可达10 pm/Hz～（1/2）,信噪比优于分立干涉仪10 dB,稳定性明显提高。

英文摘要：

A kind of orthogonal polarized laser interferometer（OPLI） optical components position fixed and performance detection methods are proposed which can be used for optical circuit integrated of sub-nanometer precision interferometer and its capability detection.OPLI integration technique and its performance on on-line detective and evaluation method are built.Based on polarization intensity detection method,on-line optical detective and its evaluation system are constructed,and four channels polarized interference stripe quality and orthogonal polarized interference Lissajous trajectory′s ellipse parameter are detected,then nanometer precision interferometer optical component integration is realized.Experiment on stability and micro-vibration measurement is carried out to compare integrated and distributed OPLI performance.The experiment results indicated that the integrated OPLI is more stable than distributed OPLI and its signal to noise ratio（SNR） is 10 dB higher than distributed OPLI,its accuracy reached 10 pm/Hz at micro-vibration measurement experiment.