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Effects of the ultrasonic flexural vibration on the interaction between the abrasive particles; pad
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：2905-2911
  • 相关项目：极大规模集成电路铜互连平坦化新原理及其应用研究
作者： Xu Wenhu|Lu Xinchun|Pan Guoshun|Lei Yuanzhong|Luo Jianbin|
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极大规模集成电路铜互连平坦化新原理及其应用研究
期刊论文 24 专利 72
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