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Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing
  • ISSN号：1932-5150
  • 期刊名称：Journal of Micro/ Nanolithography, Mems, and Moems
  • 时间：2012.9.9
  • 页码：033006-033009
  • 相关项目：飞秒激光微纳加工在高性能微光学元件制造中的应用基础研究
作者： Wang, Jiankun|Yang, Zhenchuan|Yan, Guizhen|
同期刊论文项目
飞秒激光微纳加工在高性能微光学元件制造中的应用基础研究
期刊论文 155
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