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Structure disorder degree of polysilicon thin films grown by differnt processing constant c from Ram
  • ISSN号：0022-8979
  • 期刊名称：Journal of Applied Physics
  • 时间：2013.10.10
  • 页码：183504-
  • 相关项目：单片集成的弯曲悬臂梁式三轴热对流加速度传感器研究
作者： Yanmin Zhang|Ran Hu|Daohan Ge|Naifei Ren|
同期刊论文项目
单片集成的弯曲悬臂梁式三轴热对流加速度传感器研究
期刊论文 19 获奖 1 专利 2 著作 1
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