中文摘要：

对两种物理型硬件木马造成芯片退化或失效的机理进行了详细分析.通过使用ATLAS二维器件仿真系统并结合Smart Spice电路逻辑仿真器,模拟了两种物理型硬件木马对反相器逻辑电路输出特性的影响.使用ATHENA工艺仿真系统模拟了掺杂离子注入工艺过程,实现了掺杂型硬件木马的金属-氧化物-半导体场效应管（MOSFET）器件;使用热载流子注入退化模型对ATLAS仿真器件进行热载流子压力测试,以模拟热载流子注入型硬件木马注入MOSFET器件并造成器件退化失效的过程,分别将上述掺杂型硬件木马和热载流子注入型硬件木马的MOSFET器件与另一个正常MOSFET器件组成同样的反相器逻辑电路.反相器使用Spice逻辑电路仿真输出DC直流、AC瞬态传输特性以研究物理型硬件木马对电路输出特性的影响.为了研究MOSFET器件的物理特性本身对硬件木马的影响,在不同温度不同宽长比（W/L）下同样对反相器进行Spice电路逻辑输出仿真.本文分析了离子掺杂工艺、热载流子注入压力测试形成的物理型硬件木马随压力强度、温度的变化对逻辑电路输出特性的影响.通过结果对比分析得出了含有物理型硬件木马的逻辑电路在DC直流输出特性上的扰动比AC瞬态传输特性更明显的结论.因此,本文提出了一种针对物理型硬件木马的检测流程.同时,该检测流程是一种具有可操作性的检测物理型硬件木马的方法.

英文摘要：

The semiconductor industry is rapidly developing in the global market,and chip design companies usually purchase the third-party EDA tools in order to shorten the design cycle of IC and reduce manufacturing cost.Therefore,in the IC chip production procedure there exist a lot of insecurity factors,and the hardware security of IC chips becomes the most important issue of the national security defense.Physical hardware trojan will modify the value of register,leak sensitive data and cause device degradation failure.Furthermore,the physical hardware trojans only modify the physical properties of the circuit chip rather than injects the malicious functional circuit.They are hidden more deeply than logical hardware trojans.Therefore,it is far-reaching significance issues for the hardware trojan detection methods and national security to study logic circuit transmission characteristics and the chip degradation failure physical mechanism which are caused by injection physical hardware trojans.In this paper,a metal-oxide-semiconductor field-effect transistor（MOSFET） device with injection dopant hardware trojan is realized by using ATHENA process simulation system to achieve the ion implantation process.The ATLAS simulation devices are tested using hot carrier injection degradation（hot carrier degradation is denoted by HCD） stress model for the degradation failure process which is caused by injecting the hot carrier injection hardware trojan（HCHT） into the MOSFET device.Another normal MOSFET combines with dopant hardware trojan MOSFET or hot carrier injection hardware trojan MOSFET to comprise the same inverter logic circuit by using the ATLAS two-dimensional（2D） device simulation system with Smart Spice instructions mode.The effect on logic circuit output characteristics caused by physical hardware trojan is studied by using Spice simulation to output the DC and AC transient time characteristics.It is also studied how the W/L value of a hardware trojan transistor influences the output characteristics of th