中文摘要：

真空清洁、无油一直是业界追求的理想环境，而涡旋真空泵是一种新型的无油直排介质的机械泵，它具有动力传递简单、气体流动损失小、运行平稳、结构紧凑简单、密封性能好、消耗功率小、振动噪声低、可靠性高等优点；研究认为真空泵的无油化对获得清洁、无油真空环境至关重要；介绍了涡旋泵的发展历程、工作原理、结构类型以及相关厂家产品等并对涡旋真空泵的发展趋势进行了分析。

英文摘要：

Vacuum ,which is clean and oil-free, has been the ideal environment pursued by industry and scroll vacuum pump is a new mechanical pump with oil-free and in-line media and has the advantages such as simple power transmission, small gas flow loss, smooth operation, simple and compact structure, good sealing performance, small power consumption, low vibration noise, high reliability and so on. The research indicates that oil-free vacuum is critical to obtaining clean and oil-free vacuum environment. The development process, working principles, structure ,types and related products of scroll vacuum pump are introduced and the development trend of scroll vacuum pump is analyzed.