中文摘要：

针对微机电系统（MEMS）高精度，高速度和高灵活性的要求，开发了一种具有平面并联结构的机械手代替常用的X—Y平动平台，并引入机器视觉提高系统的灵活性．利用扩展卡尔曼滤波算法估计机械手各关节的初始角位置，从而间接地保证机械手在工作空间内的绝对定位精度．针对任何微机电系统器件，该封装系统本身还被用作测量手段，建立器件的几何模型，为封装离线编程奠定了基础，实现了系统的灵活性和封装效率之间较理想的平衡．

英文摘要：

Aimed at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute for ordinary X - Y table, in addition the machine vision is implemented to improve the system＇ s flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm, then the manipulator＇ s absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device＇ s geometry model, which is the base to do off-line programming. An ideal trade-off between the system＇ s flexibility and etiiciency is got.