利用平面圆形膜片应变调谐的特点,采用膜盒式结构,将光纤Bragg光栅(FBG)沿径向贴于平面圆形膜片,利用反射波的带宽对压强敏感而对温度不敏感的特性解调压强,成功实现了温度补偿的压强传感测量.基于光谱分析仪(OSA)的0.05 nm分辨率,实验可得到测量系统的带宽随压强变化的灵敏度为0.28 nm/MPa,压强分辨率为±0.18 MPa,压强动态测量范围可达0.0~7.2 MPa.实验结果与理论分析相符.
A novel temperature compensated FBG pressure sensor based on round metal diaphragm is presented and studied theoretically and experimentally. FBG was affixed along the radius of diaphragm. The pressure was measured by the bandwidth of FBG because the bandwidth action is insensitive to temperature. This approach showed a pressure resolution of ±0.18 MPa and a pressure sensitivity of 0.28 nm/MPa in the range 0.0 MPa to 7.2 MPa when the spectral resolution is 0. 05 nm for spectral analyzer. The experimental results match the theoretical analysis well.