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(101)-oriented ZnO nanoparticles fabricated in Si (100) by Zn ion implantation and thermal oxidation
ISSN号:0167-577X
期刊名称:Materials Letters
时间:0
页码:3323-3326
相关项目:He和H离子注入Si基材料引起的表面剥离及机理研究
作者:
Shen, Y. Y.|Zhang, X. D.|Zhang, D. C.|Zhang, L. H.|Liu, C. L.|
同期刊论文项目
He和H离子注入Si基材料引起的表面剥离及机理研究
期刊论文 12
会议论文 7
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