中文摘要：

用射频磁控溅射方法制备了记录磁头用FeCoAlO薄膜软磁材料，与FeCo合金薄膜相比，FeCoAlO薄膜的软磁性能有明显改善。（Fe72Co28）100-x（Al2O3）x薄膜的饱和磁感应强度Bs在x=3．1～5．9范围内基本保持恒定，当x〉5．9时，饱和磁感应强度急剧降低；其矫顽力随Al2O3含量的增加迅速降低。当Al2O3含量为5．9时，薄膜的矫顽力由未加Al2O3时的3580A／m下降到Hcc≈18A／m，Hch≈289A／m，饱和磁感应强度Bs=2．15T；薄膜还表现出良好的高频特性，当频率压1．0GHz时，磁导率μ≈500。结构分析表明，薄膜中软磁性能的改善和添加Al2O3导致的晶粒细化有关。

英文摘要：

Soft magnetic FeCoAlO thin film for recording magnetic head were prepared by rf magnetron sputtering, with highly improved soft magnetic properties compared to that of FeCo alloy thin film. For （Fe72CO28）100-x （Al2O3）x film with x=3.1-5.9, the saturation magnetic flux density Bs remains constant, then, decreases drastically when x〉5.9. The coercivity of FeCoAlO thin films decreases with increasing Al2O3 content. As x=5.9, the coercivity force of the thin film decreases to Hcc≈418A/m, Hch≈289A/m from 3580A/m of pure FeCo film （x=0）, and the saturation magnetic flux density Bs =2.1ST. The film shows good high frequency response, with permeability μ≈500 asf≤1.0 GHz. The good magnetic properties are correlated with refining of gain size in film resulting from the introduction of Al2O3.