中文摘要：

结合微机械陀螺仪和隧道效应的特点,提出了角振动微机械隧道陀螺仪的工作原理和结构设计方案。针对微机械陀螺的驱动和检测在面内和面外的结构特点,制定了图像处理法、静电力阶跃激励法和机械激励法等振动特性测试方法,在大气环境下分别对隧道陀螺仪驱动和检测模态的振动特性进行了测试,得到了相应的谐振频率,采用不同的方法得到的结果基本一致。

英文摘要：

Based on the characteristics of micro-machined gyroscope and tunneling effect,the principle of operation and structure design of angular vibrating tunneling gyroscope have been introduced.Given the vibration direction of driving and sensing mode in in-plane and out-of-plane,several vibration measuring methods,including image processing,electrostatic force step stimulation and mechanism excitation,were utilized to test the vibration characteristics of the driving and sensing model of the tunneling gyroscope under the atmosphere environment,the resonance frequency and quality factor of the tunneling gyroscope were also obtained.The same results are obtained by different methods.