纳米连接技术是构筑纳电子器件的关键技术。但鉴于目前纳米连接机理不甚明确、纳米连接技术不甚成熟,阻碍了纳电子器件的进一步研制和应用。因此如何形成碳纳米管与金属电极间可靠、稳定、有效的互连已成为该领域的研究难点和热点。本文综述了近年来改善纳米连接性能的多种方法,并对其原理和特点进行了分析和比较。最后,对该领域未来发展的趋势进行了展望。
Nanojnining is a kind of key technology of constructing nanoelectronic devices. However, umlear mechanism anti immaturity of current uanojoining technology hinder the further development of nanoeleetronie devices and their applications. Thus, how to form a reliable, stable and efficient connection between carbon nanotuhes and metallic electrodes has become the hot and difficuh issue in this field. In this paper, recent methods of improving nanojoiuing performance are reviewed, and their prineiples and characteristics are analyzed and compared. Finally, the future trend in this field is flrcasted.