中文摘要：

根据煤矿安全生产监控系统对测量甲烷浓度全量程高准确度的需要,基于可调谐半导体激光吸收光谱技术,设计了一种全量程一体化激光甲烷传感器.采用1 653.72nm分布式反馈半导体激光器作为系统光源,单板电路实现激光器驱动、温度控制、信号调制与解调、浓度反演.为兼顾高测量准确度和大动态测量范围,系统在低浓度时利用波长调制技术进行甲烷浓度在线检测;当气体浓度大于阈值时,自动切换到直接吸收检测技术.实验结果表明,该传感器在浓度范围为0~5%内误差小于±0.06%,在浓度范围为5~100%内误差小于真值的±6%,响应时间约为15s,满足矿井实际测量需要.

英文摘要：

According to the needs of full range and high precision measurements of methane concentration in coal mine safety production monitoring system,a full-scale integrated laser methane sensor was designed based on a Tunable Diode Laser Absorption Spectroscopy（TDLAS）.A 1 653.72 nm Distributed Feedback Laser（DFB）semiconductor laser was employed as the system light source.Laser driving,temperature controlling,signal modulation and demodulation,and concentration calculation were realized by a single board circuit.To meet a high measurement precision and a large dynamic measurement range simultaneously,the wavelength modulation technique was used to detect the methane at a low concentration.When the gas concentration is higher than the threshold set in the system,the direct absorption detection technique was switched to automatically.Experimental results show that,the measurement error is less than±0.06%in the range of 0~5%and less than±6% of the actual value in the range of 5~100%,and the response time is less than 15 s,which meets the requirements of the mine measurement in practice.