中文摘要：

用透射电镜（TEM）观察磁控溅射制备Au-MgF2团簇薄膜的形貌,对团簇薄膜TEM图像采用灰度平均值法和Boltzmann拟合参数法进行二值化处理,并用分形理论表征薄膜中Au团簇的分布规律。结果显示：随着Au体积分数从6.0%增加到49.0%,用灰度平均值法所得分形维数由1.851增大到1.869,而由Boltzmann拟合参数法所得分形维数从1.669逐渐增大到1.941。两种方法所得分形参数均能表征Au团簇的尺寸和分布复杂程度随体积分数的变化规律,而由Boltzmann拟合参数法所得结果还能很好地表征不同体积分数薄膜Au团簇分布的差异性。

英文摘要：

Topography of the Au-MgF2 composite films, deposited by RF magnetron sputtering, was characterized with transmission electron microscopy （TEM）. We carried out the image binary by using the gray average method and the Boltzmann fit parameters method, and characterize the distribution of Au clusters by using fractal theory. The results shows that as Au volume fraction varying from 6.0% to 49.0%, fractal dimension increases from 1.8510 to 1.8688 for the gray average method, however, increases from 1.669 to 1.941 for the Boltzmann fit parameters method. Fractal dimension of the two methods can characterize the relation between size and distribution of Au clusters and Au volume fraction. But that of Boltzmann fit parameters method also be able to discriminate the dissimilarity of Au cluster films.