中文摘要：

建立了碳纳米管悬臂梁分子动力学模型，并对该模型的动态特性进行研究。分析了封腔中空气分子对纳米器件的阻尼作用，模拟了真空环境下碳纳米管原子处于平衡状态的自振情况，同时通过在外加激励作用下求解出该系统中碳纳米管的固有频率，绘制出了相应的幅频响应曲线。最后，对低真空环境下碳纳米管共振时的振幅进行分析。模拟结果表明：原子自振频率为2THz；碳纳米管固有频率为4．79GHz，且在初始阶段随着外加载荷的增加略有减小，随着载荷的继续增加而加大直到开关达到闭合状态；在相同的气压变化幅度下，低压环境的振幅变化远明显于高压环境下的振幅变化。

英文摘要：

A molecular dynamics model of Nanoelectromechanical（NEM） switch is estabhshed and the dynamic characteristic of this model is investigated, The air damping effect on nanostructure is studied and auto-oscillation of an atom is simulated when CNT is in balanced state. For obtaining the natural frequency of CNT by means of exerting external force on the end of CNT, the curve of amplitude-frequency response is given too. Finally, the amplitude is analyzed when CNT is resonance vibration in low vacuum. The simulation results show the natural vibration frequency of atom is 2 THz and the natural frequency of CNT is 4.79 GHz. The results also show that the frequency of CNT decreases with the applied force increase at first, but then increases with the force increase, until the switch is closed. Finally, the experiment indicates that if the variation range of pressure is in the same, the amplitude variation under low pressure is higher than that under high pressure.